Company Information
Industry 制造业
Company Introduction 公司是国内领先的半导体设备核心零部件供应商,主要从事等离子体射频电源系统、等离子体激发装置、等离子体直流电源、各种配件的研发、生产、销售及技术服务,并引进真空获得和流体控制等相关的核心零部件,围绕等离子体工艺提供核心零部件整体解决方案。公司主要围绕等离子体工艺打造产品矩阵,自研产品具体包括等离子体射频电源系统(等离子体射频电源及匹配器)、等离子体激发装置(远程等离子体源、射频离子源)、等离子体直流电源、配件(滤波器、阻抗调整器等),引进产品主要包括真空获得和流体控制分别所需的真空泵、质量流量计等核心零部件;同时还为晶圆厂提供等离子体射频电源系统原位替换及维修等技术服务。公司主要采用以销定产的生产模式,将等离子体射频电源系统等自研产品及引进产品销售给半导体、光伏、显示面板、精密光学等领域的下游客户,并提供技术服务;公司采用自主研发的模式,形成具有竞争力的产品,并通过直销模式销售。
Main Business 主要从事等离子体射频电源系统、等离子体激发装置、等离子体直流电源、各种配件的研发、生产、销售及技术服务
Legal Representative 乐卫平
Top Executives
董事长:乐卫平
董事:吴黎明,刘涛,杨喜荣,俞日明
独立董事:刘彭义,王天东,赖小琼
Top 5 Shareholder
Shareholder name Nature Holding Date
深圳市恒运昌投资有限公司限售股19.36%27/01/2026
乐卫平限售股17.31%27/01/2026
深圳市恒运昌投资中心(有限合伙)限售股15.58%27/01/2026
国投(广东)科技成果转化创业投资基金合伙企业(有限合伙)限售股6.11%27/01/2026
江苏瑞芯通宁基金半导体产业投资基金合伙企业(有限合伙)限售股3.06%27/01/2026
Company Secretary 庄丽华
Solicitors 上海市锦天城律师事务所
Auditors 天健会计师事务所(特殊普通合伙)
Tel No 0755-27813086
Fax No 0755-27813086
Website www.csl-vacuum.com
Email IR@csl-vacuum.com
Company Address
Register: 广东省深圳市宝安区西乡街道铁岗社区桃花源智创小镇功能配套区B栋101,201,301
Office: 广东省深圳市宝安区西乡街道铁岗社区桃花源智创小镇功能配套区B栋101,201,301
Listing Date 28/01/2026
Shares Capital
Shares Capital: 67,701,688
Total A Share: 67,701,688
Listed A Share: 12,727,665
Non-tradable A Share: 54,974,023
Other Share: 0
Total B Share: 0
Total H Share: 0
EPS(RMB)* ¥ 2.790
DPS(RMB)* --
NBV Per Share(RMB)* ¥ 13.390
Market Capitalization(RMB) 4.726B
Smiley face Only Chinese content is avaliable
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 : Eligible Stock for SH-HK Northbound trade (For all investors/ For institutional professional investors only)
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 : Eligible Stock for SH-HK Ex-Northbound trade (sell only)
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 : Eligible Stock for SZ-HK Northbound trade (For all investors/ For institutional professional investors only)
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 : Eligible Stock for SZ-HK Ex-Northbound trade (sell only)
* Unadjusted Data
Information provided by: etnet
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