| Industry | 制造业 | ||||||||||||||||||||||||
| Company Introduction | 公司是一家专注于特殊涂层工艺及其关联技术和材料的国家级专精特新重点“小巨人”企业，主要面向芯片制造、精密光学等领域，提供经材料改性、精密表面加工、精密清洗和特殊涂层工艺后的精密零部件产品及服务。 特殊涂层是指通过气相沉积、气溶胶、高密度等离子喷涂等特殊涂层工艺在设备零部件表面形成高致密度、低孔隙率的涂层，能够改变设备零部件物理和化学特性、稳定设备运行工艺条件和延长设备零部件寿命。随着先进制程工艺的迭代，颗粒污染和微量元素污染对芯片良率的影响随制程缩小呈“指数级增长”。特殊涂层零部件贯穿集成电路制造产业链，从硅片外延到芯片制造前道及后道的核心设备均需要特殊涂层零部件来控制颗粒污染和微量元素污染到极低的水平，从而提高芯片的良率。公司具备刻蚀、光刻、量检测、退火、薄膜沉积、硅片外延等多种类半导体设备零部件的配套能力，是国内极少数5nm及以下制程半导体刻蚀设备核心零部件的供应商。 海外特殊涂层零部件厂商为了避免技术泄密和受到国外政府限制，在中国大陆建厂后引入的都是以阳极氧化、大气等离子喷涂技术为主的产品，均未将最先进的特殊涂层技术引进中国大陆。目前，国内厂商普遍采用阳极氧化等表面处理技术，在设备零部件表面形成的氧化物保护层，该方法大多适用于成熟制程，并且在等离子体刻蚀工艺中组织和成分不稳定，常常造成微量金属和颗粒污染。随着芯片先进制程工艺不断迭代，线宽从14nm向7nm、5nm及以下节点持续突破，晶圆对颗粒污染和微量元素污染的容忍度呈指数级降低——纳米级别的颗粒剥落即可能造成微观电路短路、断路或功能失效，直接导致芯片良率大幅下滑。尤其在先进制程工艺中，需通过数十次甚至上百次的光刻、刻蚀、薄膜沉积等工序构建更复杂的微观结构，因此反应腔内零部件表面的颗粒剥落的累积风险显著上升。因此，在多样化的反应气体腐蚀、极端温度波动及高频离子轰击等极端严苛的工况下，有效控制介质窗、喷嘴、喷淋头、刻蚀环、内衬等距离晶圆最近的核心零部件的颗粒剥落数量和微量元素污染程度，是保障先进制程稳定量产、维持晶圆高良率的关键点之一。研制更耐腐蚀、更耐温度冲击的特殊涂层零部件是芯片制造向更先进制程迭代的必然发展路线。 公司特殊涂层技术突破设备制程瓶颈，促进了国产先进制程迭代升级。公司运用自主研发的多项特殊涂层工艺技术，实现特殊涂层零部件国产突破和进口替代，针对不同的运用场景能够实现超低颗粒污染和微量元素污染控制、耐等离子轰击、耐气体腐蚀、高平整精度、抗高低温冲击性等关键性能。 公司技术谱系全面，产品矩阵多元化。公司建立了覆盖关键设备自研改造、涂层材料制备改性、特殊涂层工艺开发、表面精密加工、特种金属和非金属材料精密成型、精密清洗及成品检测的全工艺链条全自主可控的严密体系，拥有介质窗、喷淋头、喷嘴、刻蚀环、内衬、支架、内门、反射板、镀金套筒、晶舟、外延片托盘、静电卡盘、反射碗、扩缩束系统等数十种机械类和光学类半导体特殊涂层零部件产品，产品覆盖了晶圆制造前道、后道制程以及硅外延片领域，在刻蚀、光刻、量检测、退火、薄膜沉积等领域取得较为突出的技术优势，在扩散、离子注入、键合和先进封装等领域小批量量产或取得客户验证，在硅外延片领域实现关键零部件产品的技术突破。除此之外，公司凭借在精密光学领域的技术积累和持续创新，为国内重点科研单位提供高激光阈值的激光光学产品，广泛应用于航空航天等国家重大战略发展领域。 公司客户群体领先多元，市场布局纵深协同。公司深度融入国内半导体产业链生态，形成零部件“国产配套+进口替代”双轮驱动的战略布局：在国产设备商市场，公司与客户A、客户B、客户D、鲁汶仪器等国产设备龙头公司建立深度合作关系，共同推进关键零部件的验证与导入；在晶圆厂市场，公司产品已通过客户E、客户F等头部晶圆厂认证，并批量供货，用于替代国外设备原装零部件。此外，公司积极拓展核电站泵阀及暗室用耐辐照材料等新兴领域，以及探索诸如OLED面板、燃气轮机、航空发动机等高端制造领域的创新应用，为可持续增长注入新动能。 未来，公司将紧握半导体设备自主可控的战略机遇，锚定国家“强链补链”攻坚方向，聚焦先进制程核心工艺节点，持续强化关键设备自研改造、涂层材料制备改性、特殊涂层工艺开发、表面精密加工、特种金属和非金属材料精密成型、精密清洗及成品检测的全工艺链条技术创新和生产配套能力，筑牢国产半导体设备供应链安全基础，推动国产半导体设备零部件从国内产业链配套向全球技术竞争核心力量演进，为集成电路产业的高质量发展注入强劲动能。 | ||||||||||||||||||||||||
| Main Business | 面向芯片制造、精密光学等领域，提供经材料改性、精密表面加工、精密清洗和特殊涂层工艺后的精密零部件产品及服务 | ||||||||||||||||||||||||
| Legal Representative | 柴杰 | ||||||||||||||||||||||||
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| Company Secretary | 周哲 | ||||||||||||||||||||||||
| Solicitors | 北京市海问律师事务所 | ||||||||||||||||||||||||
| Auditors | 天健会计师事务所（特殊普通合伙） | ||||||||||||||||||||||||
| Tel No | 028-85882022 | ||||||||||||||||||||||||
| Fax No | 028-85887726 | ||||||||||||||||||||||||
| Website | www.upam.cn | ||||||||||||||||||||||||
| ir@upam.cn | |||||||||||||||||||||||||
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| Listing Date | 11/08/2026 | ||||||||||||||||||||||||
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| EPS(RMB)* | ¥ 2.440 | ||||||||||||||||||||||||
| DPS(RMB)* | -- | ||||||||||||||||||||||||
| NBV Per Share(RMB)* | ¥ 11.180 | ||||||||||||||||||||||||
| Market Capitalization(RMB) | 8.766B |
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| * | Unadjusted Data |
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